3/25/2011	10:29:09 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/25/2011	10:29:09 AM	Recipe started at 10:29 AM
3/25/2011	10:29:09 AM	H2 valve closed
3/25/2011	10:29:09 AM	BCl3 valve closed
3/25/2011	10:29:09 AM	PH3 valve closed
3/25/2011	10:29:09 AM	SiCl4 pre valve closed
3/25/2011	10:29:09 AM	SiCl4 post valve closed
3/25/2011	10:29:09 AM	Main Vac valve closed
3/25/2011	10:29:09 AM	Bypass valve closed
3/25/2011	10:29:09 AM	Bubbler valve closed
3/25/2011	10:29:09 AM	Helium valve opened
3/25/2011	10:29:09 AM	Helium MFC set to  500.000000
3/25/2011	10:29:09 AM	H2 MFC set to  0.000000
3/25/2011	10:29:09 AM	BCl3 MFC set to  0.000000
3/25/2011	10:29:09 AM	PHl3 MFC set to  0.000000
3/25/2011	10:29:09 AM	SiCl4 MFC set to  0.000000
3/25/2011	10:29:09 AM	Bypass solenoid MFC set to  0.000000
3/25/2011	10:29:09 AM	Tube furnace set to 0
3/25/2011	10:30:29 AM	Helium valve closed
3/25/2011	10:30:29 AM	H2 valve closed
3/25/2011	10:30:29 AM	BCl3 valve closed
3/25/2011	10:30:29 AM	PH3 valve closed
3/25/2011	10:30:29 AM	SiCl4 pre valve closed
3/25/2011	10:30:29 AM	SiCl4 post valve closed
3/25/2011	10:30:29 AM	Main Vac valve closed
3/25/2011	10:30:29 AM	Bypass valve closed
3/25/2011	10:30:29 AM	Bubbler valve closed
3/25/2011	10:30:29 AM	Helium MFC set to  0.000000
3/25/2011	10:30:29 AM	H2 MFC set to  0.000000
3/25/2011	10:30:29 AM	BCl3 MFC set to  0.000000
3/25/2011	10:30:29 AM	PHl3 MFC set to  0.000000
3/25/2011	10:30:29 AM	SiCl4 MFC set to  0.000000
3/25/2011	10:30:29 AM	Bypass solenoid MFC set to  0.000000
3/25/2011	10:30:30 AM	Tube furnace set to 0
3/25/2011	10:30:30 AM	Run finished at 10:30 AM
3/25/2011	10:30:30 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/25/2011	10:37:45 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/25/2011	10:37:46 AM	Recipe started at 10:37 AM
3/25/2011	10:37:46 AM	Helium valve closed
3/25/2011	10:37:46 AM	H2 valve closed
3/25/2011	10:37:46 AM	BCl3 valve closed
3/25/2011	10:37:46 AM	PH3 valve closed
3/25/2011	10:37:46 AM	SiCl4 pre valve closed
3/25/2011	10:37:46 AM	SiCl4 post valve closed
3/25/2011	10:37:46 AM	Main Vac valve closed
3/25/2011	10:37:46 AM	Bubbler valve closed
3/25/2011	10:37:46 AM	Bypass valve opened
3/25/2011	10:37:46 AM	Helium MFC set to  0.000000
3/25/2011	10:37:46 AM	H2 MFC set to  0.000000
3/25/2011	10:37:46 AM	BCl3 MFC set to  0.000000
3/25/2011	10:37:46 AM	PHl3 MFC set to  0.000000
3/25/2011	10:37:46 AM	SiCl4 MFC set to  0.000000
3/25/2011	10:37:46 AM	Bypass solenoid MFC set to  0.000000
3/25/2011	10:37:46 AM	Tube furnace set to 0
3/25/2011	10:38:18 AM	Helium valve closed
3/25/2011	10:38:18 AM	H2 valve closed
3/25/2011	10:38:18 AM	BCl3 valve closed
3/25/2011	10:38:18 AM	PH3 valve closed
3/25/2011	10:38:18 AM	SiCl4 pre valve closed
3/25/2011	10:38:18 AM	SiCl4 post valve closed
3/25/2011	10:38:18 AM	Bubbler valve closed
3/25/2011	10:38:18 AM	Main Vac valve opened
3/25/2011	10:38:18 AM	Bypass valve opened
3/25/2011	10:38:18 AM	Helium MFC set to  0.000000
3/25/2011	10:38:18 AM	H2 MFC set to  0.000000
3/25/2011	10:38:18 AM	BCl3 MFC set to  0.000000
3/25/2011	10:38:18 AM	PHl3 MFC set to  0.000000
3/25/2011	10:38:18 AM	SiCl4 MFC set to  0.000000
3/25/2011	10:38:18 AM	Bypass solenoid MFC set to  0.000000
3/25/2011	10:38:18 AM	Tube furnace set to 0
3/25/2011	10:38:18 AM	Run finished at 10:38 AM
3/25/2011	10:38:18 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/25/2011	10:42:36 AM	Helium MFC set to  10.000000
3/25/2011	10:42:36 AM	Helium valve opened
3/25/2011	11:08:38 AM	Helium valve closed
3/25/2011	11:08:41 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/25/2011	11:08:41 AM	Recipe started at 11:08 AM
3/25/2011	11:08:41 AM	H2 valve closed
3/25/2011	11:08:41 AM	BCl3 valve closed
3/25/2011	11:08:41 AM	PH3 valve closed
3/25/2011	11:08:41 AM	SiCl4 pre valve closed
3/25/2011	11:08:41 AM	SiCl4 post valve closed
3/25/2011	11:08:41 AM	Main Vac valve closed
3/25/2011	11:08:41 AM	Bypass valve closed
3/25/2011	11:08:41 AM	Bubbler valve closed
3/25/2011	11:08:41 AM	Helium valve opened
3/25/2011	11:08:41 AM	Helium MFC set to  500.000000
3/25/2011	11:08:41 AM	H2 MFC set to  0.000000
3/25/2011	11:08:41 AM	BCl3 MFC set to  0.000000
3/25/2011	11:08:41 AM	PHl3 MFC set to  0.000000
3/25/2011	11:08:41 AM	SiCl4 MFC set to  0.000000
3/25/2011	11:08:41 AM	Bypass solenoid MFC set to  0.000000
3/25/2011	11:08:42 AM	Tube furnace set to 0
3/25/2011	11:10:03 AM	Helium valve closed
3/25/2011	11:10:03 AM	H2 valve closed
3/25/2011	11:10:03 AM	BCl3 valve closed
3/25/2011	11:10:03 AM	PH3 valve closed
3/25/2011	11:10:03 AM	SiCl4 pre valve closed
3/25/2011	11:10:03 AM	SiCl4 post valve closed
3/25/2011	11:10:03 AM	Main Vac valve closed
3/25/2011	11:10:03 AM	Bypass valve closed
3/25/2011	11:10:03 AM	Bubbler valve closed
3/25/2011	11:10:03 AM	Helium MFC set to  0.000000
3/25/2011	11:10:03 AM	H2 MFC set to  0.000000
3/25/2011	11:10:03 AM	BCl3 MFC set to  0.000000
3/25/2011	11:10:03 AM	PHl3 MFC set to  0.000000
3/25/2011	11:10:03 AM	SiCl4 MFC set to  0.000000
3/25/2011	11:10:03 AM	Bypass solenoid MFC set to  0.000000
3/25/2011	11:10:03 AM	Tube furnace set to 0
3/25/2011	11:10:03 AM	Run finished at 11:10 AM
3/25/2011	11:10:03 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/25/2011	11:13:17 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/25/2011	11:13:18 AM	Recipe started at 11:13 AM
3/25/2011	11:13:18 AM	Helium valve closed
3/25/2011	11:13:18 AM	H2 valve closed
3/25/2011	11:13:18 AM	BCl3 valve closed
3/25/2011	11:13:18 AM	PH3 valve closed
3/25/2011	11:13:18 AM	SiCl4 pre valve closed
3/25/2011	11:13:18 AM	SiCl4 post valve closed
3/25/2011	11:13:18 AM	Main Vac valve closed
3/25/2011	11:13:18 AM	Bubbler valve closed
3/25/2011	11:13:18 AM	Bypass valve opened
3/25/2011	11:13:18 AM	Helium MFC set to  0.000000
3/25/2011	11:13:18 AM	H2 MFC set to  0.000000
3/25/2011	11:13:18 AM	BCl3 MFC set to  0.000000
3/25/2011	11:13:18 AM	PHl3 MFC set to  0.000000
3/25/2011	11:13:18 AM	SiCl4 MFC set to  0.000000
3/25/2011	11:13:18 AM	Bypass solenoid MFC set to  0.000000
3/25/2011	11:13:18 AM	Tube furnace set to 0
3/25/2011	11:13:49 AM	Helium valve closed
3/25/2011	11:13:49 AM	H2 valve closed
3/25/2011	11:13:49 AM	BCl3 valve closed
3/25/2011	11:13:49 AM	PH3 valve closed
3/25/2011	11:13:49 AM	SiCl4 pre valve closed
3/25/2011	11:13:49 AM	SiCl4 post valve closed
3/25/2011	11:13:49 AM	Bubbler valve closed
3/25/2011	11:13:49 AM	Main Vac valve opened
3/25/2011	11:13:49 AM	Bypass valve opened
3/25/2011	11:13:49 AM	Helium MFC set to  0.000000
3/25/2011	11:13:49 AM	H2 MFC set to  0.000000
3/25/2011	11:13:49 AM	BCl3 MFC set to  0.000000
3/25/2011	11:13:49 AM	PHl3 MFC set to  0.000000
3/25/2011	11:13:49 AM	SiCl4 MFC set to  0.000000
3/25/2011	11:13:49 AM	Bypass solenoid MFC set to  0.000000
3/25/2011	11:13:49 AM	Tube furnace set to 0
3/25/2011	11:13:50 AM	Run finished at 11:13 AM
3/25/2011	11:13:50 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/25/2011	11:14:12 AM	Helium MFC set to  15.000000
3/25/2011	11:14:13 AM	Helium valve opened
3/25/2011	11:17:27 AM	Helium valve closed
3/25/2011	11:17:55 AM	Helium valve opened
3/25/2011	11:36:27 AM	Helium valve closed
3/25/2011	11:38:01 AM	Recipe started at 11:38 AM
3/25/2011	11:38:01 AM	Helium valve closed
3/25/2011	11:38:01 AM	BCl3 valve closed
3/25/2011	11:38:01 AM	PH3 valve closed
3/25/2011	11:38:01 AM	SiCl4 pre valve closed
3/25/2011	11:38:01 AM	SiCl4 post valve closed
3/25/2011	11:38:01 AM	Main Vac valve closed
3/25/2011	11:38:01 AM	Bypass valve closed
3/25/2011	11:38:01 AM	Bubbler valve closed
3/25/2011	11:38:01 AM	H2 valve opened
3/25/2011	11:38:01 AM	Helium MFC set to  0.000000
3/25/2011	11:38:01 AM	H2 MFC set to  500.000000
3/25/2011	11:38:01 AM	BCl3 MFC set to  0.000000
3/25/2011	11:38:01 AM	PHl3 MFC set to  0.000000
3/25/2011	11:38:01 AM	SiCl4 MFC set to  0.000000
3/25/2011	11:38:01 AM	Bypass solenoid MFC set to  0.000000
3/25/2011	11:38:01 AM	Tube furnace set to 0
3/25/2011	11:39:25 AM	Helium valve closed
3/25/2011	11:39:25 AM	BCl3 valve closed
3/25/2011	11:39:25 AM	PH3 valve closed
3/25/2011	11:39:25 AM	SiCl4 pre valve closed
3/25/2011	11:39:25 AM	SiCl4 post valve closed
3/25/2011	11:39:25 AM	Main Vac valve closed
3/25/2011	11:39:25 AM	Bypass valve closed
3/25/2011	11:39:25 AM	H2 valve opened
3/25/2011	11:39:25 AM	Bubbler valve opened
3/25/2011	11:39:25 AM	Helium MFC set to  0.000000
3/25/2011	11:39:25 AM	H2 MFC set to  500.000000
3/25/2011	11:39:25 AM	BCl3 MFC set to  0.000000
3/25/2011	11:39:25 AM	PHl3 MFC set to  0.000000
3/25/2011	11:39:25 AM	SiCl4 MFC set to  0.000000
3/25/2011	11:39:25 AM	Bypass solenoid MFC set to  0.000000
3/25/2011	11:39:25 AM	Tube furnace set to 1000
3/25/2011	11:59:25 AM	Helium valve closed
3/25/2011	11:59:25 AM	BCl3 valve closed
3/25/2011	11:59:25 AM	PH3 valve closed
3/25/2011	11:59:25 AM	Main Vac valve closed
3/25/2011	11:59:25 AM	Bypass valve closed
3/25/2011	11:59:25 AM	H2 valve opened
3/25/2011	11:59:25 AM	SiCl4 pre valve opened
3/25/2011	11:59:25 AM	SiCl4 post valve opened
3/25/2011	11:59:25 AM	Bubbler valve opened
3/25/2011	11:59:25 AM	Helium MFC set to  0.000000
3/25/2011	11:59:25 AM	H2 MFC set to  500.000000
3/25/2011	11:59:25 AM	BCl3 MFC set to  0.000000
3/25/2011	11:59:25 AM	PHl3 MFC set to  0.000000
3/25/2011	11:59:25 AM	SiCl4 MFC set to  50.000000
3/25/2011	11:59:25 AM	Bypass solenoid MFC set to  0.000000
3/25/2011	11:59:25 AM	Tube furnace set to 1000
3/25/2011	12:24:25 PM	Helium valve closed
3/25/2011	12:24:25 PM	BCl3 valve closed
3/25/2011	12:24:25 PM	PH3 valve closed
3/25/2011	12:24:25 PM	SiCl4 pre valve closed
3/25/2011	12:24:25 PM	SiCl4 post valve closed
3/25/2011	12:24:25 PM	Main Vac valve closed
3/25/2011	12:24:25 PM	Bypass valve closed
3/25/2011	12:24:25 PM	H2 valve opened
3/25/2011	12:24:25 PM	Bubbler valve opened
3/25/2011	12:24:25 PM	Helium MFC set to  0.000000
3/25/2011	12:24:25 PM	H2 MFC set to  500.000000
3/25/2011	12:24:25 PM	BCl3 MFC set to  0.000000
3/25/2011	12:24:25 PM	PHl3 MFC set to  0.000000
3/25/2011	12:24:25 PM	SiCl4 MFC set to  0.000000
3/25/2011	12:24:25 PM	Bypass solenoid MFC set to  0.000000
3/25/2011	12:24:25 PM	Tube furnace set to 0
3/25/2011	12:55:42 PM	H2 valve closed
3/25/2011	12:55:42 PM	BCl3 valve closed
3/25/2011	12:55:42 PM	PH3 valve closed
3/25/2011	12:55:42 PM	SiCl4 pre valve closed
3/25/2011	12:55:42 PM	SiCl4 post valve closed
3/25/2011	12:55:42 PM	Main Vac valve closed
3/25/2011	12:55:42 PM	Bypass valve closed
3/25/2011	12:55:42 PM	Helium valve opened
3/25/2011	12:55:42 PM	Bubbler valve opened
3/25/2011	12:55:42 PM	Helium MFC set to  500.000000
3/25/2011	12:55:42 PM	H2 MFC set to  0.000000
3/25/2011	12:55:42 PM	BCl3 MFC set to  0.000000
3/25/2011	12:55:42 PM	PHl3 MFC set to  0.000000
3/25/2011	12:55:42 PM	SiCl4 MFC set to  0.000000
3/25/2011	12:55:42 PM	Bypass solenoid MFC set to  0.000000
3/25/2011	12:55:42 PM	Tube furnace set to 0
3/25/2011	12:56:04 PM	Helium valve closed
3/25/2011	12:56:04 PM	H2 valve closed
3/25/2011	12:56:04 PM	BCl3 valve closed
3/25/2011	12:56:04 PM	PH3 valve closed
3/25/2011	12:56:04 PM	SiCl4 pre valve closed
3/25/2011	12:56:04 PM	SiCl4 post valve closed
3/25/2011	12:56:04 PM	Main Vac valve closed
3/25/2011	12:56:04 PM	Bypass valve closed
3/25/2011	12:56:04 PM	Bubbler valve closed
3/25/2011	12:56:04 PM	Helium MFC set to  0.000000
3/25/2011	12:56:04 PM	H2 MFC set to  0.000000
3/25/2011	12:56:04 PM	BCl3 MFC set to  0.000000
3/25/2011	12:56:04 PM	PHl3 MFC set to  0.000000
3/25/2011	12:56:04 PM	SiCl4 MFC set to  0.000000
3/25/2011	12:56:04 PM	Bypass solenoid MFC set to  0.000000
3/25/2011	12:56:04 PM	Tube furnace set to 0
3/25/2011	12:56:04 PM	Run finished at 12:56 PM
3/25/2011	1:01:11 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/25/2011	1:01:12 PM	Recipe started at 1:01 PM
3/25/2011	1:01:12 PM	Helium valve closed
3/25/2011	1:01:12 PM	H2 valve closed
3/25/2011	1:01:12 PM	BCl3 valve closed
3/25/2011	1:01:12 PM	PH3 valve closed
3/25/2011	1:01:12 PM	SiCl4 pre valve closed
3/25/2011	1:01:12 PM	SiCl4 post valve closed
3/25/2011	1:01:12 PM	Main Vac valve closed
3/25/2011	1:01:12 PM	Bubbler valve closed
3/25/2011	1:01:12 PM	Bypass valve opened
3/25/2011	1:01:12 PM	Helium MFC set to  0.000000
3/25/2011	1:01:12 PM	H2 MFC set to  0.000000
3/25/2011	1:01:12 PM	BCl3 MFC set to  0.000000
3/25/2011	1:01:12 PM	PHl3 MFC set to  0.000000
3/25/2011	1:01:12 PM	SiCl4 MFC set to  0.000000
3/25/2011	1:01:12 PM	Bypass solenoid MFC set to  0.000000
3/25/2011	1:01:12 PM	Tube furnace set to 0
3/25/2011	1:01:43 PM	Helium valve closed
3/25/2011	1:01:43 PM	H2 valve closed
3/25/2011	1:01:43 PM	BCl3 valve closed
3/25/2011	1:01:43 PM	PH3 valve closed
3/25/2011	1:01:43 PM	SiCl4 pre valve closed
3/25/2011	1:01:43 PM	SiCl4 post valve closed
3/25/2011	1:01:43 PM	Bubbler valve closed
3/25/2011	1:01:43 PM	Main Vac valve opened
3/25/2011	1:01:43 PM	Bypass valve opened
3/25/2011	1:01:43 PM	Helium MFC set to  0.000000
3/25/2011	1:01:43 PM	H2 MFC set to  0.000000
3/25/2011	1:01:43 PM	BCl3 MFC set to  0.000000
3/25/2011	1:01:43 PM	PHl3 MFC set to  0.000000
3/25/2011	1:01:43 PM	SiCl4 MFC set to  0.000000
3/25/2011	1:01:43 PM	Bypass solenoid MFC set to  0.000000
3/25/2011	1:01:43 PM	Tube furnace set to 0
3/25/2011	1:01:44 PM	Run finished at 1:01 PM
3/25/2011	1:01:44 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/25/2011	1:01:50 PM	Helium MFC set to  10.000000
3/25/2011	1:01:51 PM	Helium valve opened
3/25/2011	1:13:37 PM	Helium valve closed
3/25/2011	1:13:40 PM	Helium MFC set to  20.000000
3/25/2011	1:13:42 PM	Helium valve opened
3/25/2011	1:19:46 PM	Helium valve closed
3/25/2011	1:21:37 PM	Helium valve opened
3/25/2011	1:42:35 PM	Helium valve closed
3/25/2011	1:43:33 PM	Recipe started at 1:43 PM
3/25/2011	1:43:33 PM	Helium valve closed
3/25/2011	1:43:33 PM	BCl3 valve closed
3/25/2011	1:43:33 PM	PH3 valve closed
3/25/2011	1:43:33 PM	SiCl4 pre valve closed
3/25/2011	1:43:33 PM	SiCl4 post valve closed
3/25/2011	1:43:33 PM	Main Vac valve closed
3/25/2011	1:43:33 PM	Bypass valve closed
3/25/2011	1:43:33 PM	Bubbler valve closed
3/25/2011	1:43:33 PM	H2 valve opened
3/25/2011	1:43:33 PM	Helium MFC set to  0.000000
3/25/2011	1:43:33 PM	H2 MFC set to  500.000000
3/25/2011	1:43:33 PM	BCl3 MFC set to  0.000000
3/25/2011	1:43:33 PM	PHl3 MFC set to  0.000000
3/25/2011	1:43:33 PM	SiCl4 MFC set to  0.000000
3/25/2011	1:43:33 PM	Bypass solenoid MFC set to  0.000000
3/25/2011	1:43:33 PM	Tube furnace set to 0
3/25/2011	1:44:56 PM	Helium valve closed
3/25/2011	1:44:56 PM	BCl3 valve closed
3/25/2011	1:44:56 PM	PH3 valve closed
3/25/2011	1:44:56 PM	SiCl4 pre valve closed
3/25/2011	1:44:56 PM	SiCl4 post valve closed
3/25/2011	1:44:56 PM	Main Vac valve closed
3/25/2011	1:44:56 PM	Bypass valve closed
3/25/2011	1:44:56 PM	H2 valve opened
3/25/2011	1:44:56 PM	Bubbler valve opened
3/25/2011	1:44:56 PM	Helium MFC set to  0.000000
3/25/2011	1:44:56 PM	H2 MFC set to  500.000000
3/25/2011	1:44:56 PM	BCl3 MFC set to  0.000000
3/25/2011	1:44:56 PM	PHl3 MFC set to  0.000000
3/25/2011	1:44:56 PM	SiCl4 MFC set to  0.000000
3/25/2011	1:44:56 PM	Bypass solenoid MFC set to  0.000000
3/25/2011	1:44:56 PM	Tube furnace set to 1000
3/25/2011	2:04:56 PM	Helium valve closed
3/25/2011	2:04:56 PM	BCl3 valve closed
3/25/2011	2:04:56 PM	PH3 valve closed
3/25/2011	2:04:56 PM	Main Vac valve closed
3/25/2011	2:04:56 PM	Bypass valve closed
3/25/2011	2:04:56 PM	H2 valve opened
3/25/2011	2:04:56 PM	SiCl4 pre valve opened
3/25/2011	2:04:56 PM	SiCl4 post valve opened
3/25/2011	2:04:56 PM	Bubbler valve opened
3/25/2011	2:04:56 PM	Helium MFC set to  0.000000
3/25/2011	2:04:56 PM	H2 MFC set to  500.000000
3/25/2011	2:04:56 PM	BCl3 MFC set to  0.000000
3/25/2011	2:04:56 PM	PHl3 MFC set to  0.000000
3/25/2011	2:04:56 PM	SiCl4 MFC set to  50.000000
3/25/2011	2:04:56 PM	Bypass solenoid MFC set to  0.000000
3/25/2011	2:04:56 PM	Tube furnace set to 1000
3/25/2011	2:29:56 PM	Helium valve closed
3/25/2011	2:29:56 PM	BCl3 valve closed
3/25/2011	2:29:56 PM	PH3 valve closed
3/25/2011	2:29:56 PM	SiCl4 pre valve closed
3/25/2011	2:29:56 PM	SiCl4 post valve closed
3/25/2011	2:29:56 PM	Main Vac valve closed
3/25/2011	2:29:56 PM	Bypass valve closed
3/25/2011	2:29:56 PM	H2 valve opened
3/25/2011	2:29:56 PM	Bubbler valve opened
3/25/2011	2:29:56 PM	Helium MFC set to  0.000000
3/25/2011	2:29:56 PM	H2 MFC set to  500.000000
3/25/2011	2:29:56 PM	BCl3 MFC set to  0.000000
3/25/2011	2:29:56 PM	PHl3 MFC set to  0.000000
3/25/2011	2:29:56 PM	SiCl4 MFC set to  0.000000
3/25/2011	2:29:56 PM	Bypass solenoid MFC set to  0.000000
3/25/2011	2:29:56 PM	Tube furnace set to 0
3/25/2011	2:32:56 PM	H2 valve closed
3/25/2011	2:32:56 PM	BCl3 valve closed
3/25/2011	2:32:56 PM	PH3 valve closed
3/25/2011	2:32:56 PM	SiCl4 pre valve closed
3/25/2011	2:32:56 PM	SiCl4 post valve closed
3/25/2011	2:32:56 PM	Main Vac valve closed
3/25/2011	2:32:56 PM	Bypass valve closed
3/25/2011	2:32:56 PM	Helium valve opened
3/25/2011	2:32:56 PM	Bubbler valve opened
3/25/2011	2:32:56 PM	Helium MFC set to  500.000000
3/25/2011	2:32:56 PM	H2 MFC set to  0.000000
3/25/2011	2:32:56 PM	BCl3 MFC set to  0.000000
3/25/2011	2:32:56 PM	PHl3 MFC set to  0.000000
3/25/2011	2:32:56 PM	SiCl4 MFC set to  0.000000
3/25/2011	2:32:56 PM	Bypass solenoid MFC set to  0.000000
3/25/2011	2:32:56 PM	Tube furnace set to 0
3/25/2011	3:07:18 PM	Helium valve closed
3/25/2011	3:07:18 PM	H2 valve closed
3/25/2011	3:07:18 PM	BCl3 valve closed
3/25/2011	3:07:18 PM	PH3 valve closed
3/25/2011	3:07:18 PM	SiCl4 pre valve closed
3/25/2011	3:07:18 PM	SiCl4 post valve closed
3/25/2011	3:07:18 PM	Main Vac valve closed
3/25/2011	3:07:18 PM	Bypass valve closed
3/25/2011	3:07:18 PM	Bubbler valve closed
3/25/2011	3:07:18 PM	Helium MFC set to  0.000000
3/25/2011	3:07:18 PM	H2 MFC set to  0.000000
3/25/2011	3:07:18 PM	BCl3 MFC set to  0.000000
3/25/2011	3:07:18 PM	PHl3 MFC set to  0.000000
3/25/2011	3:07:18 PM	SiCl4 MFC set to  0.000000
3/25/2011	3:07:18 PM	Bypass solenoid MFC set to  0.000000
3/25/2011	3:07:18 PM	Tube furnace set to 0
3/25/2011	3:07:18 PM	Run finished at 3:07 PM
3/25/2011	3:12:10 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/25/2011	3:12:10 PM	Recipe started at 3:12 PM
3/25/2011	3:12:10 PM	Helium valve closed
3/25/2011	3:12:10 PM	H2 valve closed
3/25/2011	3:12:10 PM	BCl3 valve closed
3/25/2011	3:12:10 PM	PH3 valve closed
3/25/2011	3:12:10 PM	SiCl4 pre valve closed
3/25/2011	3:12:10 PM	SiCl4 post valve closed
3/25/2011	3:12:10 PM	Main Vac valve closed
3/25/2011	3:12:10 PM	Bubbler valve closed
3/25/2011	3:12:10 PM	Bypass valve opened
3/25/2011	3:12:10 PM	Helium MFC set to  0.000000
3/25/2011	3:12:10 PM	H2 MFC set to  0.000000
3/25/2011	3:12:10 PM	BCl3 MFC set to  0.000000
3/25/2011	3:12:10 PM	PHl3 MFC set to  0.000000
3/25/2011	3:12:10 PM	SiCl4 MFC set to  0.000000
3/25/2011	3:12:10 PM	Bypass solenoid MFC set to  0.000000
3/25/2011	3:12:11 PM	Tube furnace set to 0
3/25/2011	3:12:43 PM	Helium valve closed
3/25/2011	3:12:43 PM	H2 valve closed
3/25/2011	3:12:43 PM	BCl3 valve closed
3/25/2011	3:12:43 PM	PH3 valve closed
3/25/2011	3:12:43 PM	SiCl4 pre valve closed
3/25/2011	3:12:43 PM	SiCl4 post valve closed
3/25/2011	3:12:43 PM	Bubbler valve closed
3/25/2011	3:12:43 PM	Main Vac valve opened
3/25/2011	3:12:43 PM	Bypass valve opened
3/25/2011	3:12:43 PM	Helium MFC set to  0.000000
3/25/2011	3:12:43 PM	H2 MFC set to  0.000000
3/25/2011	3:12:43 PM	BCl3 MFC set to  0.000000
3/25/2011	3:12:43 PM	PHl3 MFC set to  0.000000
3/25/2011	3:12:43 PM	SiCl4 MFC set to  0.000000
3/25/2011	3:12:43 PM	Bypass solenoid MFC set to  0.000000
3/25/2011	3:12:43 PM	Tube furnace set to 0
3/25/2011	3:12:44 PM	Run finished at 3:12 PM
3/25/2011	3:12:44 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/25/2011	3:12:51 PM	Helium MFC set to  25.000000
3/25/2011	3:12:52 PM	Helium valve opened
3/25/2011	3:29:13 PM	Helium valve closed
3/25/2011	3:30:28 PM	Recipe started at 3:30 PM
3/25/2011	3:30:28 PM	Helium valve closed
3/25/2011	3:30:28 PM	BCl3 valve closed
3/25/2011	3:30:28 PM	PH3 valve closed
3/25/2011	3:30:28 PM	SiCl4 pre valve closed
3/25/2011	3:30:28 PM	SiCl4 post valve closed
3/25/2011	3:30:28 PM	Main Vac valve closed
3/25/2011	3:30:28 PM	Bypass valve closed
3/25/2011	3:30:28 PM	Bubbler valve closed
3/25/2011	3:30:28 PM	H2 valve opened
3/25/2011	3:30:28 PM	Helium MFC set to  0.000000
3/25/2011	3:30:28 PM	H2 MFC set to  500.000000
3/25/2011	3:30:28 PM	BCl3 MFC set to  0.000000
3/25/2011	3:30:28 PM	PHl3 MFC set to  0.000000
3/25/2011	3:30:28 PM	SiCl4 MFC set to  0.000000
3/25/2011	3:30:28 PM	Bypass solenoid MFC set to  0.000000
3/25/2011	3:30:28 PM	Tube furnace set to 0
3/25/2011	3:31:50 PM	Helium valve closed
3/25/2011	3:31:50 PM	BCl3 valve closed
3/25/2011	3:31:50 PM	PH3 valve closed
3/25/2011	3:31:50 PM	SiCl4 pre valve closed
3/25/2011	3:31:50 PM	SiCl4 post valve closed
3/25/2011	3:31:50 PM	Main Vac valve closed
3/25/2011	3:31:50 PM	Bypass valve closed
3/25/2011	3:31:50 PM	H2 valve opened
3/25/2011	3:31:50 PM	Bubbler valve opened
3/25/2011	3:31:50 PM	Helium MFC set to  0.000000
3/25/2011	3:31:50 PM	H2 MFC set to  500.000000
3/25/2011	3:31:50 PM	BCl3 MFC set to  0.000000
3/25/2011	3:31:50 PM	PHl3 MFC set to  0.000000
3/25/2011	3:31:50 PM	SiCl4 MFC set to  0.000000
3/25/2011	3:31:50 PM	Bypass solenoid MFC set to  0.000000
3/25/2011	3:31:50 PM	Tube furnace set to 1000
3/25/2011	3:51:50 PM	Helium valve closed
3/25/2011	3:51:50 PM	BCl3 valve closed
3/25/2011	3:51:50 PM	PH3 valve closed
3/25/2011	3:51:50 PM	Main Vac valve closed
3/25/2011	3:51:50 PM	Bypass valve closed
3/25/2011	3:51:50 PM	H2 valve opened
3/25/2011	3:51:50 PM	SiCl4 pre valve opened
3/25/2011	3:51:50 PM	SiCl4 post valve opened
3/25/2011	3:51:50 PM	Bubbler valve opened
3/25/2011	3:51:50 PM	Helium MFC set to  0.000000
3/25/2011	3:51:50 PM	H2 MFC set to  500.000000
3/25/2011	3:51:50 PM	BCl3 MFC set to  0.000000
3/25/2011	3:51:50 PM	PHl3 MFC set to  0.000000
3/25/2011	3:51:50 PM	SiCl4 MFC set to  50.000000
3/25/2011	3:51:50 PM	Bypass solenoid MFC set to  0.000000
3/25/2011	3:51:50 PM	Tube furnace set to 1000
3/25/2011	4:11:50 PM	Helium valve closed
3/25/2011	4:11:50 PM	BCl3 valve closed
3/25/2011	4:11:50 PM	PH3 valve closed
3/25/2011	4:11:50 PM	SiCl4 pre valve closed
3/25/2011	4:11:50 PM	SiCl4 post valve closed
3/25/2011	4:11:50 PM	Main Vac valve closed
3/25/2011	4:11:50 PM	Bypass valve closed
3/25/2011	4:11:50 PM	H2 valve opened
3/25/2011	4:11:50 PM	Bubbler valve opened
3/25/2011	4:11:50 PM	Helium MFC set to  0.000000
3/25/2011	4:11:50 PM	H2 MFC set to  500.000000
3/25/2011	4:11:50 PM	BCl3 MFC set to  0.000000
3/25/2011	4:11:50 PM	PHl3 MFC set to  0.000000
3/25/2011	4:11:50 PM	SiCl4 MFC set to  0.000000
3/25/2011	4:11:50 PM	Bypass solenoid MFC set to  0.000000
3/25/2011	4:11:50 PM	Tube furnace set to 0
3/25/2011	4:14:50 PM	H2 valve closed
3/25/2011	4:14:50 PM	BCl3 valve closed
3/25/2011	4:14:50 PM	PH3 valve closed
3/25/2011	4:14:50 PM	SiCl4 pre valve closed
3/25/2011	4:14:50 PM	SiCl4 post valve closed
3/25/2011	4:14:50 PM	Main Vac valve closed
3/25/2011	4:14:50 PM	Bypass valve closed
3/25/2011	4:14:50 PM	Helium valve opened
3/25/2011	4:14:50 PM	Bubbler valve opened
3/25/2011	4:14:50 PM	Helium MFC set to  500.000000
3/25/2011	4:14:50 PM	H2 MFC set to  0.000000
3/25/2011	4:14:50 PM	BCl3 MFC set to  0.000000
3/25/2011	4:14:50 PM	PHl3 MFC set to  0.000000
3/25/2011	4:14:50 PM	SiCl4 MFC set to  0.000000
3/25/2011	4:14:50 PM	Bypass solenoid MFC set to  0.000000
3/25/2011	4:14:50 PM	Tube furnace set to 0
3/25/2011	4:43:04 PM	Helium valve closed
3/25/2011	4:43:04 PM	H2 valve closed
3/25/2011	4:43:04 PM	BCl3 valve closed
3/25/2011	4:43:04 PM	PH3 valve closed
3/25/2011	4:43:04 PM	SiCl4 pre valve closed
3/25/2011	4:43:04 PM	SiCl4 post valve closed
3/25/2011	4:43:04 PM	Main Vac valve closed
3/25/2011	4:43:04 PM	Bypass valve closed
3/25/2011	4:43:04 PM	Bubbler valve closed
3/25/2011	4:43:04 PM	Helium MFC set to  0.000000
3/25/2011	4:43:04 PM	H2 MFC set to  0.000000
3/25/2011	4:43:04 PM	BCl3 MFC set to  0.000000
3/25/2011	4:43:04 PM	PHl3 MFC set to  0.000000
3/25/2011	4:43:04 PM	SiCl4 MFC set to  0.000000
3/25/2011	4:43:04 PM	Bypass solenoid MFC set to  0.000000
3/25/2011	4:43:05 PM	Tube furnace set to 0
3/25/2011	4:43:05 PM	Run finished at 4:43 PM
3/25/2011	4:44:16 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/25/2011	4:44:17 PM	Recipe started at 4:44 PM
3/25/2011	4:44:17 PM	Helium valve closed
3/25/2011	4:44:17 PM	H2 valve closed
3/25/2011	4:44:17 PM	BCl3 valve closed
3/25/2011	4:44:17 PM	PH3 valve closed
3/25/2011	4:44:17 PM	SiCl4 pre valve closed
3/25/2011	4:44:17 PM	SiCl4 post valve closed
3/25/2011	4:44:17 PM	Main Vac valve closed
3/25/2011	4:44:17 PM	Bubbler valve closed
3/25/2011	4:44:17 PM	Bypass valve opened
3/25/2011	4:44:17 PM	Helium MFC set to  0.000000
3/25/2011	4:44:17 PM	H2 MFC set to  0.000000
3/25/2011	4:44:17 PM	BCl3 MFC set to  0.000000
3/25/2011	4:44:17 PM	PHl3 MFC set to  0.000000
3/25/2011	4:44:17 PM	SiCl4 MFC set to  0.000000
3/25/2011	4:44:17 PM	Bypass solenoid MFC set to  0.000000
3/25/2011	4:44:17 PM	Tube furnace set to 0
3/25/2011	4:44:48 PM	Helium valve closed
3/25/2011	4:44:48 PM	H2 valve closed
3/25/2011	4:44:48 PM	BCl3 valve closed
3/25/2011	4:44:48 PM	PH3 valve closed
3/25/2011	4:44:48 PM	SiCl4 pre valve closed
3/25/2011	4:44:48 PM	SiCl4 post valve closed
3/25/2011	4:44:48 PM	Bubbler valve closed
3/25/2011	4:44:48 PM	Main Vac valve opened
3/25/2011	4:44:48 PM	Bypass valve opened
3/25/2011	4:44:48 PM	Helium MFC set to  0.000000
3/25/2011	4:44:48 PM	H2 MFC set to  0.000000
3/25/2011	4:44:48 PM	BCl3 MFC set to  0.000000
3/25/2011	4:44:48 PM	PHl3 MFC set to  0.000000
3/25/2011	4:44:48 PM	SiCl4 MFC set to  0.000000
3/25/2011	4:44:48 PM	Bypass solenoid MFC set to  0.000000
3/25/2011	4:44:48 PM	Tube furnace set to 0
3/25/2011	4:44:48 PM	Run finished at 4:44 PM
3/25/2011	4:44:48 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/25/2011	5:20:13 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/25/2011	5:20:14 PM	Recipe started at 5:20 PM
3/25/2011	5:20:14 PM	H2 valve closed
3/25/2011	5:20:14 PM	BCl3 valve closed
3/25/2011	5:20:14 PM	PH3 valve closed
3/25/2011	5:20:14 PM	SiCl4 pre valve closed
3/25/2011	5:20:14 PM	SiCl4 post valve closed
3/25/2011	5:20:14 PM	Main Vac valve closed
3/25/2011	5:20:14 PM	Bypass valve closed
3/25/2011	5:20:14 PM	Bubbler valve closed
3/25/2011	5:20:14 PM	Helium valve opened
3/25/2011	5:20:14 PM	Helium MFC set to  500.000000
3/25/2011	5:20:14 PM	H2 MFC set to  0.000000
3/25/2011	5:20:14 PM	BCl3 MFC set to  0.000000
3/25/2011	5:20:14 PM	PHl3 MFC set to  0.000000
3/25/2011	5:20:14 PM	SiCl4 MFC set to  0.000000
3/25/2011	5:20:14 PM	Bypass solenoid MFC set to  0.000000
3/25/2011	5:20:14 PM	Tube furnace set to 0
3/25/2011	5:21:34 PM	Helium valve closed
3/25/2011	5:21:34 PM	H2 valve closed
3/25/2011	5:21:34 PM	BCl3 valve closed
3/25/2011	5:21:34 PM	PH3 valve closed
3/25/2011	5:21:34 PM	SiCl4 pre valve closed
3/25/2011	5:21:34 PM	SiCl4 post valve closed
3/25/2011	5:21:34 PM	Main Vac valve closed
3/25/2011	5:21:34 PM	Bypass valve closed
3/25/2011	5:21:34 PM	Bubbler valve closed
3/25/2011	5:21:34 PM	Helium MFC set to  0.000000
3/25/2011	5:21:34 PM	H2 MFC set to  0.000000
3/25/2011	5:21:34 PM	BCl3 MFC set to  0.000000
3/25/2011	5:21:34 PM	PHl3 MFC set to  0.000000
3/25/2011	5:21:34 PM	SiCl4 MFC set to  0.000000
3/25/2011	5:21:34 PM	Bypass solenoid MFC set to  0.000000
3/25/2011	5:21:34 PM	Tube furnace set to 0
3/25/2011	5:21:34 PM	Run finished at 5:21 PM
3/25/2011	5:21:34 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/25/2011	5:25:02 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/25/2011	5:25:02 PM	Recipe started at 5:25 PM
3/25/2011	5:25:02 PM	Helium valve closed
3/25/2011	5:25:02 PM	H2 valve closed
3/25/2011	5:25:02 PM	BCl3 valve closed
3/25/2011	5:25:02 PM	PH3 valve closed
3/25/2011	5:25:02 PM	SiCl4 pre valve closed
3/25/2011	5:25:02 PM	SiCl4 post valve closed
3/25/2011	5:25:02 PM	Main Vac valve closed
3/25/2011	5:25:02 PM	Bubbler valve closed
3/25/2011	5:25:02 PM	Bypass valve opened
3/25/2011	5:25:02 PM	Helium MFC set to  0.000000
3/25/2011	5:25:02 PM	H2 MFC set to  0.000000
3/25/2011	5:25:02 PM	BCl3 MFC set to  0.000000
3/25/2011	5:25:02 PM	PHl3 MFC set to  0.000000
3/25/2011	5:25:02 PM	SiCl4 MFC set to  0.000000
3/25/2011	5:25:02 PM	Bypass solenoid MFC set to  0.000000
3/25/2011	5:25:02 PM	Tube furnace set to 0
3/25/2011	5:25:34 PM	Helium valve closed
3/25/2011	5:25:34 PM	H2 valve closed
3/25/2011	5:25:34 PM	BCl3 valve closed
3/25/2011	5:25:34 PM	PH3 valve closed
3/25/2011	5:25:34 PM	SiCl4 pre valve closed
3/25/2011	5:25:34 PM	SiCl4 post valve closed
3/25/2011	5:25:34 PM	Bubbler valve closed
3/25/2011	5:25:34 PM	Main Vac valve opened
3/25/2011	5:25:34 PM	Bypass valve opened
3/25/2011	5:25:34 PM	Helium MFC set to  0.000000
3/25/2011	5:25:34 PM	H2 MFC set to  0.000000
3/25/2011	5:25:34 PM	BCl3 MFC set to  0.000000
3/25/2011	5:25:34 PM	PHl3 MFC set to  0.000000
3/25/2011	5:25:34 PM	SiCl4 MFC set to  0.000000
3/25/2011	5:25:34 PM	Bypass solenoid MFC set to  0.000000
3/25/2011	5:25:34 PM	Tube furnace set to 0
3/25/2011	5:25:34 PM	Run finished at 5:25 PM
3/25/2011	5:25:34 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/25/2011	5:27:16 PM	Helium MFC set to  30.000000
3/25/2011	5:27:17 PM	Helium valve opened
3/25/2011	5:40:35 PM	Helium valve closed
3/25/2011	5:42:05 PM	Helium MFC set to  20.000000
3/25/2011	5:42:06 PM	Helium valve opened
3/25/2011	6:49:38 PM	Helium valve closed
3/25/2011	6:50:26 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/25/2011	6:50:27 PM	Recipe started at 6:50 PM
3/25/2011	6:50:27 PM	H2 valve closed
3/25/2011	6:50:27 PM	BCl3 valve closed
3/25/2011	6:50:27 PM	PH3 valve closed
3/25/2011	6:50:27 PM	SiCl4 pre valve closed
3/25/2011	6:50:27 PM	SiCl4 post valve closed
3/25/2011	6:50:27 PM	Main Vac valve closed
3/25/2011	6:50:27 PM	Bypass valve closed
3/25/2011	6:50:27 PM	Bubbler valve closed
3/25/2011	6:50:27 PM	Helium valve opened
3/25/2011	6:50:27 PM	Helium MFC set to  500.000000
3/25/2011	6:50:27 PM	H2 MFC set to  0.000000
3/25/2011	6:50:27 PM	BCl3 MFC set to  0.000000
3/25/2011	6:50:27 PM	PHl3 MFC set to  0.000000
3/25/2011	6:50:27 PM	SiCl4 MFC set to  0.000000
3/25/2011	6:50:27 PM	Bypass solenoid MFC set to  0.000000
3/25/2011	6:50:27 PM	Tube furnace set to 0
3/25/2011	6:51:48 PM	Helium valve closed
3/25/2011	6:51:48 PM	H2 valve closed
3/25/2011	6:51:48 PM	BCl3 valve closed
3/25/2011	6:51:48 PM	PH3 valve closed
3/25/2011	6:51:48 PM	SiCl4 pre valve closed
3/25/2011	6:51:48 PM	SiCl4 post valve closed
3/25/2011	6:51:48 PM	Main Vac valve closed
3/25/2011	6:51:48 PM	Bypass valve closed
3/25/2011	6:51:48 PM	Bubbler valve closed
3/25/2011	6:51:48 PM	Helium MFC set to  0.000000
3/25/2011	6:51:48 PM	H2 MFC set to  0.000000
3/25/2011	6:51:48 PM	BCl3 MFC set to  0.000000
3/25/2011	6:51:48 PM	PHl3 MFC set to  0.000000
3/25/2011	6:51:48 PM	SiCl4 MFC set to  0.000000
3/25/2011	6:51:48 PM	Bypass solenoid MFC set to  0.000000
3/25/2011	6:51:48 PM	Tube furnace set to 0
3/25/2011	6:51:49 PM	Run finished at 6:51 PM
3/25/2011	6:51:49 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/25/2011	6:53:11 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/25/2011	6:53:12 PM	Recipe started at 6:53 PM
3/25/2011	6:53:12 PM	Helium valve closed
3/25/2011	6:53:12 PM	H2 valve closed
3/25/2011	6:53:12 PM	BCl3 valve closed
3/25/2011	6:53:12 PM	PH3 valve closed
3/25/2011	6:53:12 PM	SiCl4 pre valve closed
3/25/2011	6:53:12 PM	SiCl4 post valve closed
3/25/2011	6:53:12 PM	Main Vac valve closed
3/25/2011	6:53:12 PM	Bubbler valve closed
3/25/2011	6:53:12 PM	Bypass valve opened
3/25/2011	6:53:12 PM	Helium MFC set to  0.000000
3/25/2011	6:53:12 PM	H2 MFC set to  0.000000
3/25/2011	6:53:12 PM	BCl3 MFC set to  0.000000
3/25/2011	6:53:12 PM	PHl3 MFC set to  0.000000
3/25/2011	6:53:12 PM	SiCl4 MFC set to  0.000000
3/25/2011	6:53:12 PM	Bypass solenoid MFC set to  0.000000
3/25/2011	6:53:12 PM	Tube furnace set to 0
3/25/2011	6:53:43 PM	Helium valve closed
3/25/2011	6:53:43 PM	H2 valve closed
3/25/2011	6:53:43 PM	BCl3 valve closed
3/25/2011	6:53:43 PM	PH3 valve closed
3/25/2011	6:53:43 PM	SiCl4 pre valve closed
3/25/2011	6:53:43 PM	SiCl4 post valve closed
3/25/2011	6:53:43 PM	Bubbler valve closed
3/25/2011	6:53:43 PM	Main Vac valve opened
3/25/2011	6:53:43 PM	Bypass valve opened
3/25/2011	6:53:43 PM	Helium MFC set to  0.000000
3/25/2011	6:53:43 PM	H2 MFC set to  0.000000
3/25/2011	6:53:43 PM	BCl3 MFC set to  0.000000
3/25/2011	6:53:43 PM	PHl3 MFC set to  0.000000
3/25/2011	6:53:43 PM	SiCl4 MFC set to  0.000000
3/25/2011	6:53:43 PM	Bypass solenoid MFC set to  0.000000
3/25/2011	6:53:43 PM	Tube furnace set to 0
3/25/2011	6:53:43 PM	Run finished at 6:53 PM
3/25/2011	6:53:43 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
